High-current metal ion implantation for industrial applications |
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| Authors: | W. L. Lin X. J. Ding J. M. Sang J. Xu X. M. Yuan |
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| Affiliation: | (1) Institute of Low Energy Nuclear Physics, Beijing Normal University, 100875 Beijing, China;(2) Beijing General Research Institute of Non-Ferrous Metals, 100088 Beijing, China |
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| Abstract: | Ion implantation, as an efficient surface processing technique, has developed to include the implantation of various metallic
ions for improving not only wear properties, but also such other surface properties as solid lubrication, fatigue, chemical
stability, and engineering reliability. The high-dose metal ion implantation that can be accumulated in a short time over
a relatively large implanting area makes metal vapor vacuum arc (MEVVA) source ion implantation well suited to practical surface
engineering modification applications. |
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| Keywords: | industrial application high-current metal ion implication surface processing |
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