利用负刚度效应调谐的硅调谐式陀螺仪

为了验证硅调谐式陀螺仪原理的可行性,研究了硅调谐式陀螺仪的调谐机理,硅转子运动模态和加工工艺以及信号检测与再平衡控制回路。提出了一种利用力矩器的负刚度效应来实现硅调谐式陀螺仪调谐的新方法,推导了静电负刚度调谐的理论公式;设计、仿真、加工了硅薄片式转子平衡环部件和电容器极板,给出了电容信号敏感接口电路、升压放大电路、反馈校正电路和再平衡控制回路。在此基础上,实现了硅调谐式陀螺仪原理样机。试验结果证实,利用负刚度效应调谐是可行的,接口电路和再平衡控制回路设计是合理的。初步性能测试表明,硅调谐式陀螺仪可实现标度因数为1.42mV/((°)/s),标度因数非线性为2.47%,量程为±200(°)/s。试验结果验证了该陀螺仪基本原理的可行性。

Silicon tuning gyroscope tuned by negative stiffness effect

In order to verify the feasibility of the principle of a silicon tuning gyroscope, the tuning mechanism of the gyroscope, and the oscillation mode and process flows of a silicon rotor were introduced, and the signal detecting circuits and rebalancing control loops of the gyroscope were also researched. Then, a new tuning method which tuned the silicon tuning gyroscope by the negative stiffness effect from a moment meter was proposed. The tuned theoretical formula by negative stiffness effect was deduced, and the polar plate of a capacitor and the disc rotor with an equilibrium ring were designed, simulated and fabricated. Moreover, the interface circuit of sensing capacitance signals, the voltage booster circuit, feedback correcting circuit and the rebalancing control loop were designed. On the basis of above, a prototype of the silicon tuning gyroscope was achieved. Experiment results prove that the new tuning method based on the negative stiffness effect from moment meter is feasible, and the designs of interface circuits and rebalancing control loops are available. The preliminary performance test of the prototype shows that the scale factor is 1.42 mV/((°)/s), scale factor nonlinearity is 2.47％ and the maximum rate is ±200 (°)/s, which proves that the feasibility of the proposed tuning method for silicon tuning gyroscopes.