Influence of the ion incidence angle of alumina surface cleanness,roughness and topography

Polycrystalline ceramic specimens of 96% sintered alumina and mechanically polished 99.5% alumina were bombarded by Ar^ü ions at an applied voltage of 7 kV at various incident angles from 0 to 1.4 rad (0 to 80°) and at a beam current of about 70 A. The influence of the incidence angle on alumina surface cleanness, roughness and topography was investigated.