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紫外激光烧蚀金属Al靶诱导等离子体的发射光谱研究
引用本文:曾宪康,方尔梯,张谊华,张抗战,黄正宇,滕玉美.紫外激光烧蚀金属Al靶诱导等离子体的发射光谱研究[J].应用激光,1994(2).
作者姓名:曾宪康  方尔梯  张谊华  张抗战  黄正宇  滕玉美
作者单位:华东理工大学化学物理研究室
摘    要:通过测定紫外激光烧蚀Al靶诱导等离子体的发射光谱,研究了激光烧蚀Al靶的溅射过程和烧蚀环境气体对发射光谱强度的影响,提出电子碰撞激发模型,定性解释了烧蚀环境气体对等离子体发射光谱的增强效应。

关 键 词:紫外激光,激光烧蚀溅射,原子发射光谱,金属Al

Optical Spectra Studies on Laser-Ablated Plasma Emission of Metal Al
Xiankang Zeng, Erti Fang, Yihua Zhang, Kangzhan Zhang, Zhengyu Huang, and Yumei Teng.Optical Spectra Studies on Laser-Ablated Plasma Emission of Metal Al[J].Applied Laser,1994(2).
Authors:Xiankang Zeng  Erti Fang  Yihua Zhang  Kangzhan Zhang  Zhengyu Huang  and Yumei Teng
Abstract:Measurements of optical emission from the ablation plume of metal Al by XeClexcimer laser are reported.The effects of the surrounding atmosphere pressure(argon,and helium)over the range 13.3Pa to 101.3kPa on optical emission was studied. The results are qualitatively explained using a simple model based on optical emission arising from inelastic collision between the elemental species and electron with high.kinetic energy.
Keywords:UV laser  Laser ablation plasma  atomic emission spectra  Aluminium  
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