The impact of III-V semiconductors on microelectromechanicalsystems |
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| Authors: | Woods R.C. Powell A.L. |
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| Affiliation: | Dept. of Electron. & Electr. Eng., Sheffield Univ.; |
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| Abstract: | This article examines the special features of the III-V semiconductors, such as gallium arsenide and chemically related compounds, which make them an attractive alternative to silicon-based technology in the field of microelectromechanical systems. As in conventional electronic systems, it is not expected that the III-V compounds will become exclusively used in all instances, but rather a substantial niche market-exploiting the special advantages of the compound semiconductors-is likely to be established |
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