| 利用激光掺杂技术制造半导体结型探测器 |
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| 引用本文： | 申勇,蒋锦江,严美琼,林理彬.利用激光掺杂技术制造半导体结型探测器[J].核电子学与探测技术,1986(3). |
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| 作者姓名： | 申勇 蒋锦江 严美琼 林理彬 |
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| 作者单位： | 四川大学物理系
(申勇，蒋锦江，严美琼)，四川大学物理系(林理彬) |
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| 摘 要： | 本文介绍用激光掺杂技术在高阻硅中掺入杂质来制造核辐射结型探测器的方法。测试结果表明,所制作的这种探测器性能良好稳定,一致性好,制作周期短。
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| 关 键 词： | 结型探测器 激光掺杂 放大红宝石激光器 |
Fabrication of Semiconductor Junction Detectors With Lager Doping Technique |
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| Shen Youn Jiang Jinjiang Yan Meiqiong Lin Libin.Fabrication of Semiconductor Junction Detectors With Lager Doping Technique[J].Nuclear Electronics & Detection Technology,1986(3). |
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| Authors: | Shen Youn Jiang Jinjiang Yan Meiqiong Lin Libin |
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| Affiliation: | Physics Department of Sichuan University |
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| Abstract: | In this paper fabrication of nuclear radiation detectors by using laser-doping technique is reported. Test shows that the detectors have excellent and stable properties and good consistency. In addition their fabricating period is short. |
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| Keywords: | Junction detector Laser-doping Magnifying ruby laser device |
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