| 二极溅射沉积Fe-N-O薄膜的形貌与结构分析 |
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| 引用本文： | 崔国栋,杨川,高国庆. 二极溅射沉积Fe-N-O薄膜的形貌与结构分析[J]. 功能材料, 2005, 36(5): 783-785 |
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| 作者姓名： | 崔国栋 杨川 高国庆 |
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| 作者单位： | 西南交通大学,材料科学与工程学院,四川,成都,610031;西南交通大学,材料科学与工程学院,四川,成都,610031;西南交通大学,材料科学与工程学院,四川,成都,610031 |
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| 摘 要： | 利用二极溅射的方法在不同衬底上沉积了Fe N O薄膜。通过扫描电子显微镜(SEM)、光电子能谱(XPS)和透射电子显微镜(TEM)等先进实验分析手段对二极溅射沉积Fe N O薄膜的形貌与结构进行了分析。XPS和TEM的结果表明,薄膜的主要成分为FeO和少量的Fe16N2多晶体组成,生长上存在择优取向;表面均匀、致密、平整,晶粒大小在50nm左右。
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| 关 键 词： | Fe-N-O薄膜 SEM XPS TEM |
The surface morphology and structure of two-pole sputtered iron nitrogen oxide thin films |
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| CUI Guo-dong,Yang Chuan,GAO Guo-qing. The surface morphology and structure of two-pole sputtered iron nitrogen oxide thin films[J]. Journal of Functional Materials, 2005, 36(5): 783-785 |
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| Authors: | CUI Guo-dong Yang Chuan GAO Guo-qing |
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| Abstract: | The Fe-N-O thin films were two-pole sputtered on different substrates. The surface morphology, composition and structure character of the Fe-N-O thin films were studied by scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM). The results of XPS and TEM show that the main phase of Fe-N-O film was FeO, but have a little Fe_(16)N_2. The orientation of the deposited films was found through the results of TEM. The films were nanocrystalline, having crystal size of 50nm or less. |
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| Keywords: | Fe-N-O thin films scanning electron microscopy X-ray photoelectron spectroscopy transmission electron microscopy |
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