| 计算机硬盘磁头滑块的设计与加工研究 |
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| 引用本文： | 谭晓兰,孟永钢,林晶,李宁.计算机硬盘磁头滑块的设计与加工研究[J].机械设计,2010,27(4). |
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| 作者姓名： | 谭晓兰 孟永钢 林晶 李宁 |
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| 作者单位： | 1. 北方工业大学,机电学院,北京,100041
2. 清华大学,摩擦学国家重点实验室,北京,100084 |
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| 基金项目： | 北京市自然科学基金资助项目(3082009) |
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| 摘 要： | 研究计算机硬盘磁头滑块承载面结构的设计理论与加工方法。分析了现有磁头滑块的结构特点及其设计理论和设计方法;利用光刻及干法刻蚀的工艺及设备,进行了所设计磁头滑块的微加工;并利用三维表面形貌测量仪对所加工的磁头进行了加工质量分析,给出实验测量值与设计值的比较结果。
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| 关 键 词： | 磁头滑块 干法刻蚀 三维形貌 |
Research on the design and fabrication of air bearing sliders in hard disk drives |
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| TAN Xiao-lan,MENG Yong-gang,LIN Jing,LI Ning.Research on the design and fabrication of air bearing sliders in hard disk drives[J].Journal of Machine Design,2010,27(4). |
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| Authors: | TAN Xiao-lan MENG Yong-gang LIN Jing LI Ning |
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| Affiliation: | 1. College of Electromechanical Engineering/a>;North China University of Technology/a>;Beijing 100041/a>;China/a>;2 State Key Laboratory of Tribology/a>;Tsinghua University/a>;Beijing 100084/a>;China |
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| Abstract: | The methods of design and fabrication of head sliders are discussed in this paper. The structures and design methods of head sliders are analysed,and the micro-fabrication of a head slider has been completed in term of the methods and equipment of lithography and dry etching. 3D surface microstructures of the head slider fabricated with the dry etching are measured on a Vecco MHT-III interferometer,and the analysis results are shown. |
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| Keywords: | head slider dry etching surface profile |
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