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多孔硅衬底上ZnS薄膜的白光光致发光
引用本文:王彩凤,李清山,胡波,李卫兵.多孔硅衬底上ZnS薄膜的白光光致发光[J].半导体学报,2010,31(3):033002-4.
作者姓名:王彩凤  李清山  胡波  李卫兵
基金项目:Natural Science Foundation of Shandong Province (No. Y2002A09) and Research Foundation for Young Scientists in Innovation Engineering of Binzhou University (No. BZXYQNLG200703)
摘    要:通过脉冲激光沉积(PLD)技术在多孔硅(PS)衬底上制备了ZnS薄膜。用光致发光(PL)的方法观察到白光发射,这个白光是由ZnS薄膜的蓝、绿光和PS的红光叠加形成的。白光光致发光谱是一个从450nm 到700nm的较强的可见光宽谱带。同时研究了激发波长、ZnS薄膜的生长温度、PS的孔隙率和退火温度对ZnS/PS光致发光谱的影响。

关 键 词:光致发光光谱  硫化锌薄膜  硅衬底  多孔硅  发光灯  脉冲激光沉积  聚苯乙烯  薄膜沉积
收稿时间:8/23/2009 2:31:25 PM

White light photoluminescence from ZnS films on porous Si substrates
Wang Caifeng,Li Qingshan,Hu Bo and Li Weibing.White light photoluminescence from ZnS films on porous Si substrates[J].Chinese Journal of Semiconductors,2010,31(3):033002-4.
Authors:Wang Caifeng  Li Qingshan  Hu Bo and Li Weibing
Affiliation:Department of Physics and Electronic Science, Binzhou University, Binzhou 256603, China;School of Physics and Electronic Engineering, Ludong University, Yantai 264025, China;Flying College, Binzhou University, Binzhou 256603, China;Department of Physics and Electronic Science, Binzhou University, Binzhou 256603, China
Abstract:ZnS films were deposited on porous Si (PS) substrates using a pulsed laser deposition (PLD) technique. White light emission is observed in photoluminescence (PL) spectra, and the white light is the combination of blue and green emission from ZnS and red emission from PS. The white PL spectra are broad, intense in a visible band ranging from 450 to 700 nm. The effects of the excitation wavelength, growth temperature of ZnS films, PS porosity and annealing temperature on the PL spectra of ZnS/PS were also investigated.
Keywords:white light emission  photoluminescence  ZnS films  porous Si
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