| 多弧离子沉积（TiFeCr）N多元膜 |
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| 引用本文： | 谢致薇,李瑜煜.多弧离子沉积（TiFeCr）N多元膜[J].金属热处理,1998(9):3-5. |
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| 作者姓名： | 谢致薇 李瑜煜 |
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| 作者单位： | 广东工业大学材料系 |
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| 摘 要： | 研究了多弧离子沉积（ＴｉＦｅＣｒ）Ｎ多元膜的性能，并与同一设备下沉积ＴｉＮ膜的性能进行比较。结果表明，（ＴｉＦｅＣｒ）Ｎ多元膜的力学性能和耐蚀性能均优于ＴｉＮ膜。定量金相分析结果表明，（ＴｉＦｅＣｒ）Ｎ多元膜的孔隙度比ＴｉＮ膜低得多。文中对多元膜的强化机理进行了讨论，认为孔隙度降低是使多元膜性能大幅度提高的主要原因。
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| 关 键 词： | 多弧离子镀 （TiFeCr）N多元膜 高速钢基体 |
(TiFeCr)N Films Deposited by Multi arc Ion Plating |
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| Xie Zhiwei,Li Yuyu,Li Qiaoshen,Lin Songsheng,Chen haiyan,Xie Guangrong,Huang Xiaoping.(TiFeCr)N Films Deposited by Multi arc Ion Plating[J].Heat Treatment of Metals,1998(9):3-5. |
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| Authors: | Xie Zhiwei Li Yuyu Li Qiaoshen Lin Songsheng Chen haiyan Xie Guangrong Huang Xiaoping |
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| Abstract: | TiFeCr)N films are deposited by multi arc ion plating and the properties are studied.The results show that the mechanical properties and the corrosion resistance of (TiFeCr)N films are significantly higher than those of TiN films,that the porosity of (TiFeCr)N is much lower than that of TiN.The reasons of improvement on properties of the multi component films are also discussed.The lower porosity is thought to be one of the main reasons |
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| Keywords: | multi arc ion plating (TiFeCr)N films high speed steel substrate |
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