| 碲锌镉衬底缺陷对液相外延碲镉汞薄膜结构的影响 |
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| 引用本文： | 吴刚,唐利斌,马庆华,赵增林,张梅,黄晖,姬荣斌.碲锌镉衬底缺陷对液相外延碲镉汞薄膜结构的影响[J].激光与红外,2005,35(9):663-667. |
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| 作者姓名： | 吴刚 唐利斌 马庆华 赵增林 张梅 黄晖 姬荣斌 |
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| 作者单位： | 1. 昆明物理研究所红外材料研发中心,云南,昆明,650223;长春理工大学,吉林,长春,130022
2. 昆明物理研究所红外材料研发中心,云南,昆明,650223 |
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| 基金项目： | 致谢：在本论文的完成过程中,得到了昆明物理研究所宋炳文研究员的有益指导,作者在此表示衷心感谢. |
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| 摘 要： | 采用红外显微镜、X射线双晶回摆衍射法、X射线貌相术对CdZnTe衬底中的沉淀相、亚结构、组分偏析等缺陷进行了研究，并对用此衬底液相外延的HgCdTe薄膜作了测试。结果显示：CdZnTe衬底中亚晶界处聚集的位错在外延生长中呈发散状向薄膜中延伸，造成了薄膜形成亚晶界和更大面积的由位错引起的晶格畸变应力区域，影响了薄膜结构的完整性。
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| 关 键 词： | X射线双晶回摆衍射法 貌相术 CdZnTe衬底 HgCdTe薄膜 液相外延 Te沉淀相 |
| 文章编号： | 1001-5078（2005）09-0663-05 |
| 收稿时间： | 2005-03-17 |
| 修稿时间： | 2005-03-172005-05-10 |
Study of Structural Effects of Defects in CdZnTe Substrate on HgCdTe Thin Film Grown by Liquid Phase Epitaxy |
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| WU Gang,TANG Li-bin,MA Qing-hua,ZHAO Zeng-lin,ZHANG Mei,HUANG Hui,JI Rong-bin.Study of Structural Effects of Defects in CdZnTe Substrate on HgCdTe Thin Film Grown by Liquid Phase Epitaxy[J].Laser & Infrared,2005,35(9):663-667. |
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| Authors: | WU Gang TANG Li-bin MA Qing-hua ZHAO Zeng-lin ZHANG Mei HUANG Hui JI Rong-bin |
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| Affiliation: | 1.Infrared Materials Research and Development Center, Kunming Institute of Physics, Kunming 650223, China; 2. Changchun University of Science and Technology, Changchun, 130022, China |
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| Abstract: | The characterizations of CdZnTe substrate and HgCdTe epilayer grown by liquid phase epitaxy have been carried out by means of infrared microscope, X-ray double crystal rocking curve method and X-ray topography method of precipitate, substructure and compositional segregation etc. The results show that dislocations gathered at the subgrain boundary in CdZnTe substrate expend to the epilayer HgCdTe in a radiation like way, resulting in the subgrain in epilayer and the larger lattice distortion stress area caused by defects, which affects the structural perfection in HgCdTe thin film. |
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| Keywords: | X-ray double crystal rocking diffraetion topography CdZnTe substrate HgCdTe thin film liquid phase epitaxy Te precipitate |
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