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| 集束型半导体制造设备的预防维修计划优化 | |
| 引用本文： | 厉红,钱省三. 集束型半导体制造设备的预防维修计划优化[J]. 半导体技术, 2005, 30(11): 39-42 |
| 作者姓名： | 厉红 钱省三 |
| 作者单位： | 浙江理工大学机械与自动控制学院,杭州,310018;上海理工大学管理学院,上海,200093;上海理工大学管理学院,上海,200093 |
| 摘 要： | 研究了生产200mm以上晶圆的半导体制造企业中的主要设备--集束型设备(cluster tools)的预防维修计划优化问题.基于半导体集成电路生产线的复杂性及集束型设备的特点,建立了基于系统观的集束型设备预防维修计划实时优化模型,设计了用遗传算法求解模型的方法,最后以一个实例及运行结果说明了研究的实用性. |
| 关 键 词： | 集束型设备 预防维修计划 优化 遗传算法 |
| 文章编号： | 1003-353X(2005)11-0039-04 |
| 收稿时间： | 2005-09-22 |
| 修稿时间： | 2005-09-22 |
Optimizing of Preventive Maintenance Scheduling for Cluster Tools of Semiconductor Manufacturing |
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| LI Hong,Qian Xing-san. Optimizing of Preventive Maintenance Scheduling for Cluster Tools of Semiconductor Manufacturing[J]. Semiconductor Technology, 2005, 30(11): 39-42 | |
| Authors: | LI Hong Qian Xing-san |
| Abstract: | The preventive maintenance optimal scheduling for cluster tools are main equipments in the modern wafer fabrication facility is studied. Based on the complexity of semiconductor manufacturing system and the characteristic of cluster tools,a real-time optimal model of preventive maintenance scheduling for cluster tools based on system standpoint is developed and a GA method is devised. A case is presented to show the practicability of our work. |
| Keywords: | cluster tools preventive maintenance scheduling optimization genetic algorithm |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |