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Sensing Amorphous/Crystalline Silicon Surface Passivation by Attenuated Total Reflection Infrared Spectroscopy of Amorphous Silicon on Glass |
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| Authors: | Abolmasov S. N. Abramov A. S. Semenov A. V. Shakhray I. S. Terukov E. I. Malchukova E. V. Trapeznikova I. N. |
| Affiliation: | 1.R and D Center of Thin Film Technologies in Energetics, 194064, St. Petersburg, Russia ;2.Ioffe Physicotechnical Institute, 194021, St. Petersburg, Russia ;3.Hevel LLC, 117342, Moscow, Russia ;4.Saint-Petersburg Electrotechnical University, 197376, St. Petersburg, Russia ; |
| Abstract: | Semiconductors - Attenuated total reflection Fourier transform infrared (ATR FTIR) spectroscopy and effective lifetime measurements have been used to characterize amorphous/crystalline silicon... |
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