| 晶体硅太阳电池减反射膜的研究 |
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| 引用本文： | 赵萍,麻晓园,邹美玲.晶体硅太阳电池减反射膜的研究[J].现代电子技术,2011,34(12):145-147,151. |
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| 作者姓名： | 赵萍 麻晓园 邹美玲 |
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| 作者单位： | 1. 西安邮电学院,电子工程学院,陕西西安710121
2. 江阴浚鑫科技有限公司,江苏江阴,214400 |
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| 基金项目： | 国家自然科学基金资助项目，陕西省教育厅基金资助项目 |
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| 摘 要： | 在太阳电池表面形成一层减反射薄膜是提高太阳电池的光电转换效率比较可行且降低成本的方法。应用PECVD（等离子体增强化学气相沉积）系统,采用SiH4和NH3气源以制备氮化硅薄膜。研究探索了PECVD生长氮化硅薄膜的基本物化性质以及在沉积过程中反应压强、反应温度、硅烷氨气流量比和微波功率对薄膜性质的影响。通过大量实验,分析了氮化硅薄膜的相对最佳沉积参数,并得出制作减反射膜的优化工艺。
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| 关 键 词： | 太阳电池 PECVD 减反射 氮化硅薄膜 |
Research on Antireflection Coating of Crystalline Silicon Solar Cells |
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| ZHAO Ping,MA Xiao-yuan,ZOU Mei-ling.Research on Antireflection Coating of Crystalline Silicon Solar Cells[J].Modern Electronic Technique,2011,34(12):145-147,151. |
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| Authors: | ZHAO Ping MA Xiao-yuan ZOU Mei-ling |
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| Affiliation: | ZHAO Ping1,MA Xiao-yuan2,ZOU Mei-ling2(1.Xi'an University of Post & Telecommunications,Xi'an 710121,China,2.Jetion Technology Co.Ltd.,Jiangyin 214400,China) |
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| Abstract: | Depositing antireflection films on solar cells is the most doable way to improve conversion efficiency of solar cells,which can also debase the cost of solar cells.The PECVD(Plasma Enhanced Chemical Vapor Deposition) system and the reactants of silane and ammonia are applied to fabricating SiN thin film.The effects of reaction temperature,the flow ratio of silane over ammonia and the microwave power on the film character are researched.The effects of post deposition annealing on solar cell materials are als... |
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| Keywords: | solar cells PECVD antireflection SiN thin film |
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