Fabrication of three-dimensional hemispherical structures using photolithography |
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Authors: | Chee Tiong Lim Hong Yee Low Johnson K K Ng Wen-Tso Liu Yong Zhang |
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Affiliation: | (1) Division of Bioengineering, National University of Singapore, 7 Engineering Drive 1, Block E3A #04-15, Singapore, 117574, Singapore;(2) Institute of Materials Research and Engineering, Singapore, Singapore;(3) Department of Paediatrics, School of Medicine, National University of Singapore, Singapore, Singapore;(4) Environmental Science and Engineering, National University of Singapore, Singapore, Singapore |
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Abstract: | A photolithography technique using SU-8 and PDMS was developed to fabricate three-dimensional hemispherical structures. This
technique utilized a mask-aligner and normal binary coded photomasks to generate hemispherical pits on SU-8, followed by PDMS
molding to obtain an array of dome-shaped structures. Using this technique, a microfluidic device was fabricated with a patterning
area that consisted of an array of 5 μm wells and dome-shaped structures with 10 μm diameter and 6 μm height. Encoded microbeads,
6 μm in size, were immobilized and patterned in the microfluidic device under flow conditions and a DNA hybridization experiment
was performed to demonstrate the incorporation of encoded beads that would enable a high level of multiplexing in bioassays. |
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