Synthesis of silicon oxynitride by infiltration-mediated combustion |
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| Authors: | I A Studenikin V V Grachev |
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| Affiliation: | (1) Institute of Structural Macrokinetics and Materials Science, Chernogolovka, Moscow, 142432, Russia |
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| Abstract: | Silicon oxynitride Si2N2 O was synthesized from a mixture of Si, SiO2, and Si3N4 by infiltrationmediated combustion in nitrogen gas. The chemical/phase composition of product and process parameters (temperature
and burning velocity) were studied upon variation in charge composition and initial pressure of gas reagent. Parameters of
the reaction yielding single-phase Si2N2O have been optimized.
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| Keywords: | SHS silicon oxynitride filtration combustion |
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