在线APCVD镀膜玻璃渐变过渡层性能研究

通过在线常压化学相沉积镀膜手段制备了FTO玻璃的单层硅/锡混合过渡膜层,并通过各种分析手段测试了可见光透过率、方块电阻、膜层表面结构及纵向元素分布等性能,研究了其结构组成对各项性能的影响.结果表明:膜层中Sn含量由表面至基底玻璃逐渐减小同时Si含量逐渐增加,为良好的SiO2/SnO2渐变结构膜层;膜层可见光透过率主要由其膜层结构决定,在一定的范围内,可以通过调整膜层的渐变结构来改变其可见光透过率;表层致密程度及膜层结构渐变可以改善膜层的导电性;可作为FTO镀膜玻璃的过渡层使用.

Properties of Gradual Transition Layer of Online APCVD Coated Glass

A single layer of Si/Sn hybrid transition film has been prepared by online APCVD coating method on FTO glass , using various methods to test some properties such as transmittance of visible light , square resistance , surface structure and longitudinal element distribution , to study the influence of the structure composition on the properties .The result shows that the content of Sn in the film decreases gradually from the surface to the base glass , and the content of Si increases gradually , it is a good layer of SiO2/SnO2 gradient structure; The transmittance of the visible light is mainly determined by the structure of the film .Within a certain range , the transmittance of the visible light can be changed by adjusting the gradient structure of the film; The density and structure change of the surface layer can improve the conductivity of the film;It can be used as the transition layer of FTO coated glass .