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Effect of annealing temperature of Bi1.5Zn1.0Nb1.5O7 gate insulator on performance of ZnO based thin film transistors |
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| Authors: | Ye Wei Ren Wei Shi Peng Jiang Zhuangde |
| Affiliation: | 1. Electronic Materials Research Laboratory,Key Laboratory of the Ministry of Education & International Center for Dielectric Research,Xi'an Jiaotong University,Xi'an 710049,China;2. State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710049,China |
| Abstract: | |
| Keywords: | pyrochlore BZN thin films ZnO-TFTs RF magnetron sputtering annealing temperature |
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