| 一种新型低噪声高均匀性红外焦平面读出电路 |
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| 引用本文： | 吕坚,周云,张东路,蒋亚东.一种新型低噪声高均匀性红外焦平面读出电路[J].微电子学,2010,40(2). |
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| 作者姓名： | 吕坚 周云 张东路 蒋亚东 |
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| 作者单位： | 电子科技大学,电子薄膜与集成器件国家重点实验室,成都,610054 |
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| 基金项目： | 国家杰出青年基金资助项目(60525101) |
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| 摘 要： | 针对非制冷微测辐射热计焦平面阵列,设计了一种低噪声、高均匀性的读出电路。该读出电路结合相关双采样技术和自归零技术,对固定图像噪声以及l/f噪声都能起到很好的抑制作用。目前,该电路已应用到160×120阵列的非制冷微测辐射热计焦平面上,并在0.5μm CMOS工艺下成功流片。测试结果表明,固定图像噪声仅为0.087 V,均方根噪声为256μV。
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| 关 键 词： | 读出电路 微测辐射热计 读出均匀性 |
Novel Infrared Focal Array Readout IC with High Uniformity and Low Noise |
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| L Jian,ZHOU Yun,ZHANG Donglu,JIANG Yadong.Novel Infrared Focal Array Readout IC with High Uniformity and Low Noise[J].Microelectronics,2010,40(2). |
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| Authors: | L Jian ZHOU Yun ZHANG Donglu JIANG Yadong |
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| Affiliation: | U|¨;State Key Laboratory of Elec.Thin-film and Integr.Dev./a>;Univ.of Elec.Sci.and Technol.of China/a>;Chengdu 610054/a>;P.R.China |
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| Abstract: | A novel read-out circuit featuring low noise and high uniformity was designed for uncooled micro-bolometer focal array. By using double-sampling and auto-zero adjustment technology, fixed pattern noise and 1/f noise were suppressed. The circuit was implemented in 0.5 μm CMOS technology in a 160×120 uncooled micro-bolometer focal array. Test results showed that the circuit had a fixed-pattern noise of 0.087 V and an RMS noise of 256 μV. |
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| Keywords: | Readout IC Micro-bolometer Readout uniformity |
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