| 喷雾热解法制备薄膜技术 |
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| 引用本文： | 宫华,刘开平.喷雾热解法制备薄膜技术[J].中国陶瓷,2004,40(5):33-36. |
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| 作者姓名： | 宫华 刘开平 |
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| 作者单位： | 长安大学材料工程系,西安,710054 |
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| 摘 要： | 介绍了喷雾热解法制备薄膜技术,综述了喷雾热解法制备薄膜的研究进展,着重介绍了喷雾热解法制备铁电薄膜的研究,以及等离子体增强喷雾热解法制备薄膜技术。
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| 关 键 词： | 喷雾热解法 静电雾化沉积 等离子体增强喷雾热解法 |
| 文章编号： | 1001-9642(2004)05-0033-04 |
| 修稿时间： | 2004年6月2日 |
SPRAY PYROLYSIS TECHNIQUE USED TO PREPARED THIN FILMS |
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| Gong hua,Liu kaiping.SPRAY PYROLYSIS TECHNIQUE USED TO PREPARED THIN FILMS[J].China Ceramics,2004,40(5):33-36. |
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| Authors: | Gong hua Liu kaiping |
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| Abstract: | The spray pyrolysis technique used to prepare thin films was introduced in the paper. Therecent studies on the thin films prepared by spray pyrolysis were reviewed. Especially,ferroelectric thinfilms prepared by spray pyrolysis and plasma-enhanced spray pyrolysis technique were introduced in detail. |
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| Keywords: | spay pyrolysis electrostatic deposition plasma-enhanced spray pyrolysis |
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