| 微机械加速度传感器性能的等效电学模拟 |
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| 引用本文： | 车录锋,熊斌,王跃林.微机械加速度传感器性能的等效电学模拟[J].电子机械工程,2002,18(2):32-34. |
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| 作者姓名： | 车录锋 熊斌 王跃林 |
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| 作者单位： | 中国科学院上海冶金研究所传感技术国家重点实验室,上海,200050 |
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| 摘 要： | 建立了微机械电容式加速度传感器的等效电学模型，通过振动特性的等效电路模型分析了加速度传感器对正弦加速度信号，阶跃加速度信号，及存在反馈时的直流加速度信号的振动位移响应情况；利用压控电容模型分析了加速度传感器检测正弦加速度信号时的小电容检测电路的性能。模拟结果表明采用反馈可以拓宽加速度传感器的测量范围，利用等效电学模型可以优化接口电路的整体性能。
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| 关 键 词： | 微机械加速度传感器 等效电路模型 压控电容模型 模拟 |
| 文章编号： | 1008-5300(2002)02-0032-03 |
| 修稿时间： | 2001年9月20日 |
Equivalent Electrical Simulation of Micro Acceleration Sensor |
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| Che Lufeng,Xiong Bin and Wang Yuelin.Equivalent Electrical Simulation of Micro Acceleration Sensor[J].Electro-Mechanical Engineering,2002,18(2):32-34. |
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| Authors: | Che Lufeng Xiong Bin and Wang Yuelin |
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| Affiliation: | State Key Lab. of Transducer Technology, Shanghai Institute of Metallurgy, Chinese Academy of Science,State Key Lab. of Transducer Technology, Shanghai Institute of Metallurgy, Chinese Academy of Science and State Key Lab. of Transducer Technology, Shanghai Institute of Metallurgy, Chinese Academy of Science |
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| Abstract: | According to its equivalent electrical model, oscillating displacement responses of micro acceleration sensor to sinusoidal acceleration signal, step signal and constant acceleration signal with feedback are analysed and performance of interfacing circuit is simulated. Results show that measuring range is increased by feedback and performances of interfacing circuits may be optimized. |
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| Keywords: | Micromachined acceleration sensor Equivalent circuit model Voltage controlled capacitor model Simulation |
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