Cr含量对类石墨碳涂层硬度及其价键结构的影响

为了探讨Cr含量对类石墨碳(GLC)涂层硬度的影响机理,采用非平衡磁控溅射离子镀技术,通过调整Cr靶电流,制备出了具有不同Cr含量的GLC涂层.借助显微硬度计测量了涂层的硬度,利用X射线衍射(XRD)和X射线光电子能谱(XPS)分析了涂层的成分、相组成和主元素的价键结构.结果表明,Cr有显著软化GLC涂层的作用.随着Cr含量增加,GLC涂层中的sp3杂化碳的含量持续减小,sp2杂化碳的含量先增后减,而金属铬及碳铬化合物的含量则不断增大.上述因素对GLC涂层的硬度变化均有影响,而涂层中sp3杂化碳的含量随着Cr含量增加持续减小是造成GLC涂层硬度不断降低的主要原因.

Influence of Cr content on hardness and valence bond structure of graphite-like carbon coatings

Graphite-like carbon(GLC) coatings with various Cr content were deposited by means of altering sputtering current on a Cr target using unbalanced magnetron sputter ion plating deposition technique,and the effects of Cr content on hardness and valence bond structure of the coatings were investigated.The micro-hardness of the coatings was measured using a microhardness tester.X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS) were used to determine the component,crystal phase and main elements' valence bond structure of the coatings.The results show that Cr element has strong softening effect on GLC coatings.With increasing Cr content,the sp~3 carbon content in the coatings decreases continuously,and the sp~2 carbon content also decreases gradually after an evident increase,but the content of metallic Cr and chromium carbide increase constantly.All these factors above-mentioned can affect the hardness of GLC coatings,and the most important factor causing the coatings soften is that the sp~3 carbon content decreases continuously with increasing Cr content.