| 小尺寸硅绝缘体光波导损耗测量 |
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| 引用本文： | 刘军,袁晓东,罗章,郭楚才,叶卫民.小尺寸硅绝缘体光波导损耗测量[J].激光与光电子学进展,2011(2):30-35. |
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| 作者姓名： | 刘军 袁晓东 罗章 郭楚才 叶卫民 |
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| 作者单位： | 国防科学技术大学光电科学与工程学院; |
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| 摘 要： | 基于法布里-珀罗(F-P)腔理论建立了一种简单有效的硅绝缘体(SOI)光波导损耗测量方法.该方法采用端面耦合,通过测试波导反射功率谱并利用傅里叶频谱信息,完成波导损耗的测量.推导中指出了无法直接利用反射谱F-P峰峰谷值求解损耗的限制因素.应用该方法实现了对刻蚀深度为750 nm和宽度为1200 nm的SOI脊形波导损耗...
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| 关 键 词： | 集成光学 法布里-珀罗腔技术 脊形波导 损耗测量 反射谱 |
Loss Measurement of Small-Size Silicon-on-Insulator Ridge Waveguide |
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| Liu Jun Yuan Xiaodong Luo Zhang Guo Chucai Ye Weimin.Loss Measurement of Small-Size Silicon-on-Insulator Ridge Waveguide[J].Laser & Optoelectronics Progress,2011(2):30-35. |
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| Authors: | Liu Jun Yuan Xiaodong Luo Zhang Guo Chucai Ye Weimin |
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| Affiliation: | Liu Jun Yuan Xiaodong Luo Zhang Guo Chucai Ye Weimin(College of Photoelectric Science and Engineering,National University of Defense Technology,Changsha,Hunan 410073,China) |
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| Abstract: | A loss measurement method on silicon-on-insulator (SOI) waveguide is proposed on the basis of Fabry-Perot (F-P) cavity theory.Through end coupling,the method utilizes the Fourier transform information of the reflection power spectrum to achieve the waveguide loss measurement.In the process of derivation,the main reason why the loss index can not be directly solved from the peak and valley values of the F-P peaks of reflection spectrum is presented.In the experiment,the loss measurement on a SOI ridge wavegu... |
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| Keywords: | integrated optics Fabry-Perot cavity technique ridge waveguide loss measurement reflection spectrum |
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