含Mo的PVD涂层结构及其摩擦学特性的研究进展

从含Mo元素的代表性涂层入手,综述了二元、三元再到多元含Mo系列PVD涂层的研究现状和进展,探究了不同元素添加、不同制备参数等对涂层微观结构、力学性能和摩擦学性能等的影响。在涂层组分从二元发展到多元的过程中,改变掺杂元素种类、含量,制备参数会引起涂层微观结构的变化进而提升涂层力学性能和摩擦学性能。涂层性能的改善,有利于增强对机械设备中关键传动零部件的保护,延长机械设备使用寿命,对军工及社会发展具有重大意义。

Progress of Researching on Structure and Tribological Properties of Mo-containing PVD Coatings

This paper starts with the representative coatings containing Mo element and researches on the status and progress of binary,ternary and multi-component Mo-containing PVD coatings and the effects of different element additions and different preparation parameters on the microstructure,mechanical properties and tribological properties of the coating.In the process of the coating composition changing from binary to multi-component,the change of the microstructure of the coating is caused by changing the type and content of doping elements and the preparation parameters,which can improve its mechanical and tribological properties.The improvement of the coating performance is beneficial to enhance the protection of key transmission components in mechanical equipment and prolong the service life.It is of great significance to military industry and social development.