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TiN涂层残余应力对其界面结合强度的影响
引用本文:胡爱萍,孔德军,朱伟.TiN涂层残余应力对其界面结合强度的影响[J].工具技术,2008,42(11).
作者姓名:胡爱萍  孔德军  朱伟
作者单位:江苏工业学院机械与能源工程学院,213016,常州市
基金项目:江苏省高校自然科学基础研究项目  
摘    要:用X射线衍射法测试了40Cr基体表面生成的TiN涂层结合界面残余应力,并利用划痕试验法测试了TiN涂层的结合强度,建立了残余应力与结合强度的定性关系。试验结果表明,TiN涂层残余应力对其结合强度有明显的影响,涂层残余应力越大,其结合强度越小,在涂层制备程中减小残余应力,有利于提高其结合强度。

关 键 词:结合强度  X衍射法(XRD)  TiN涂层  残余应力

Effects of Residual Stresses of TiN Coating on Its Interfacial Bonding Strength
Hu Aiping,Kong Dejun,Zhu Wei.Effects of Residual Stresses of TiN Coating on Its Interfacial Bonding Strength[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2008,42(11).
Authors:Hu Aiping  Kong Dejun  Zhu Wei
Abstract:Residual stresses of TiN coating bonding interface coated on the 40Cr substrate were measured by X-ray diffraction(XRD),bonding strength of TiN coating was measured with scratching test,and the qualitative relation between residual stress and bonding strength is established.The experimental results are shown that the effect of residual stress of TiN coating on its bonding strength is obvious,the bigger residual stress of TiN film,the smaller its bonding strength,the decrease of residual stress will benefited improve its bonding strength during TiN coating preparation.
Keywords:bonding strength  X-ray diffraction(XRD)  TiN coating  residual stress
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