| 集成化触觉阵列传感器的研制 |
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| 引用本文： | 田雷,孙凤玲,寇文兵.集成化触觉阵列传感器的研制[J].传感器与微系统,2001,20(2):52-53. |
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| 作者姓名： | 田雷 孙凤玲 寇文兵 |
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| 作者单位： | 信息产业部电子第四十九研究所, |
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| 摘 要： | 介绍了一种集成化单晶硅触觉阵列传感器。该传感器共有 10 0个触觉单元 ,芯片尺寸为 2 5mm×2 5mm ,厚度小于 10mm。在制造工艺上 ,把CMOS工艺和半导体平面工艺融为一体 ,利用MEMS技术在每个触觉单元上制造了触觉受力点 ,易于感受所触物体 ,其测试、记录过程由计算机完成。该种传感器具有一定的开发价值和应用前景。
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| 关 键 词： | 触觉阵列 单晶硅 集成 |
| 文章编号： | 1000-9787(2001)02-0052-02 |
| 修稿时间： | 2000年10月6日 |
A research on integrated tactile-array sensor |
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| TIAN Lei,SUN Feng-ling,KOU Wen-bing.A research on integrated tactile-array sensor[J].Transducer and Microsystem Technology,2001,20(2):52-53. |
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| Authors: | TIAN Lei SUN Feng-ling KOU Wen-bing |
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| Abstract: | An integrated monocrystalline silicon tactile-array sensor is introduced,having 100 taticle-units.Chip's dimensions: 25*#mm×25*#mm,thickness is less than 10*#mm.Having been combined with CMOS and simiconductor planar technology and by using MEMS technology, points that are force-sensitive to the objects that they contact are made in each tactile-unit;test and record is completed by computer. |
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| Keywords: | tactile array monorystalline silicon integration |
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