| 基于DSP-FPGA高速控制系统的应用研究 |
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| 引用本文： | 邓卫梅,陈代谢,殷伯华,薛虹,韩立.基于DSP-FPGA高速控制系统的应用研究[J].现代科学仪器,2014(1):30-34. |
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| 作者姓名： | 邓卫梅 陈代谢 殷伯华 薛虹 韩立 |
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| 作者单位： | [1]中国科学院电工研究所微纳加工研究部,北京100190 [2]中国科学院大学,北京100049 |
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| 基金项目： | 基金资助：国家863计划,工业型扫描探针显微测试系统及关键技术（2012AA041204）;国家科技支撑计划,微纳技术计量标准和标准物质研究,2011BAK15800 |
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| 摘 要： | 为了满足应用对控制系统高速高精度的要求，本文将原子力显微镜作为控制对象，主要研究基于DSP—FPGA控制系统设计中的关键技术问题。包括各模块的功能划分、模块间通讯模式设计并以单行扫描为例进行编程说明。随后将PID算法嵌入FPGA，对大范围快速原子力显微镜的单点测试做闭环反馈控制。实验结果显示，与以PCI04为核心的控制系统相比，基于DSP—FPGA的控制系统大大提高了大范围快速原子力显微镜的扫描速度和控制精度。
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| 关 键 词： | SEED--HPS6455 DSP-FPGA 大范围快速AFM |
Research on Application of High-speed Control System Based on DSP-FPGA |
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| Deng Weimei,Chen Daixie,Yin Bohua,Xue Hong,Han Li.Research on Application of High-speed Control System Based on DSP-FPGA[J].Modern Scientific Instruments,2014(1):30-34. |
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| Authors: | Deng Weimei Chen Daixie Yin Bohua Xue Hong Han Li |
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| Affiliation: | (Institute of Electrical Engineering,Chinese Academy of Science,Micro and Nano Fabrication Laboratory, Beijing 100190;2University of Chinese Academy of Sciences,Beijing 100049) |
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| Abstract: | In order to meet the requirements for high-speed and high-precision control system,researches and designs have been done on the use of DSP-FPGA-based control system where atomic force microscope is used as the control object.These designs included functional division of each module,communication pattern among modules,and a programming example of single line scan was presented.Then the PID algorithm was embedded in FPGA to do a closed- loop feedback control for single-point testing of a wide-range and high-speed atomic force microscope.Compared with PC104-based control system, great improvements in scanning speed and control precision of a wide-range and high-speed atomic force microscope were experimentally demonstrated by using DSP-FPGA-based control system. |
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| Keywords: | SEED-HPS6455 DSP-FPGA A wide range rapid AFM |
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