Synthesis of low resistivity complex oxides on MgO using Pt as buffer layer |
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| Authors: | P. Tiwari X. D. Wu S. R. Foltyn I. H. Campbell Q. X. Jia R. E. Muenchausen D. E. Peterson T. E. Mitchell |
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| Affiliation: | (1) Superconductivity Technology Center, Los Alamos National Laboratory, 87545 Los Alamos, NM;(2) Center for Materials Science, Los Alamos National Laboratory, 87545 Los Alamos, NM;(3) Present address: IBM Microelectronics, 1000 River St, 05452 Essex Junction, VT |
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| Abstract: | Highly crystalline SrRuO3 (SRO) and La0.5Sr0.5CoO3 (LSCO) thin films were deposited on (100) Pt/ MgO by pulsed laser deposition. The films were mainly (001) textured normal
to the substrate surface with a high degree of in-plane orientation with respect to the substrate’s major axes. These films
were characterized using x-ray diffraction, Rutherford backscattering, four-point probe resistivity measurement, and transmission
electron microscopy. The room temperature resistivity for LSCO and SRO films on Pt/MgO was found to be ∼35 and ∼40 μΩ-cm,
respectively. An ion beam minimum channeling yield of ∼43% and ∼33% was obtained for LSCO and SRO films, respectively. The
interface between Pt and oxide was found to be smooth and free from any interfacial diffusion. This result showed that high-quality
low resistivity oxide thin films can be deposited on Pt. |
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| Keywords: | Low resistivity oxide Pt/MgO pulsed laser deposition (PLD) thin films |
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