Hot-carrier-induced time dependent dielectric breakdown in high voltage pMOSFETs |
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Authors: | F. Alagi |
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Affiliation: | STMicroelectronics 20010 Cornaredo, MI-Italy, Via Tolomeo 1, Italy |
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Abstract: | We report about the time dependent gate dielectric breakdown failure of high voltage p-channel MOSFETs submitted to hot-carrier stress. We consider the time integral of the instantaneous gate current raised to a constant exponent as a measure of the dielectric film wear out, and we check that this integral computed up to the dielectric failure time is indeed a constant not depending on the drain-source stress bias. |
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