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| 氧流量对绒面氧化锌透明导电薄膜性能的影响 | |
| 引用本文： | 段苓伟,薛俊明,杨瑞霞,赵颖,耿新华.氧流量对绒面氧化锌透明导电薄膜性能的影响[J].光电子．激光,2008,19(9). |
| 作者姓名： | 段苓伟 薛俊明 杨瑞霞 赵颖 耿新华 |
| 作者单位： | 1. 河北工业大学信息学院,天津300130;南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室;光电信息技术科学教育部重点实验室,南开大学,天津300071 2. 南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室;光电信息技术科学教育部重点实验室,南开大学,天津300071 3. 河北工业大学信息学院,天津,300130 |
| 基金项目： | 国家重点基础研究发展计划(973计划)，天津市科技发展基金 |
| 摘 要： | 利用中频脉冲磁控溅射工艺制备了低阻高透过率的ZAO薄膜,用湿法腐蚀的方法将制备的平面ZAO薄膜在0.5%的稀盐酸中浸泡一定时间得到绒面ZAO薄膜.研究了氧流量对腐蚀后薄膜表面形貌的影响.结果表明,随着氧流量的增大腐蚀后薄膜的表面形貌由花瓣状逐渐为适合太阳电池的陨石坑状,在氧流量为3.6 sc-cm时(氩流量为12 sccm)得到最好的绒面ZAO薄膜,继续增加氧流量,薄膜开始变得粗糙,说明薄膜的表面形貌又变差. |
| 关 键 词： | 中频溅射 ZnO:Al(ZAO)薄膜 氧流量 绒面结构 湿法腐蚀 |
Oxygen flow rate dependence of the properties of textured ZnO:Al films |
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| DUAN Ling-wei,XUE Jun-ming,YANG Rui-xi,ZHAO Ying,GENG Xin-hua.Oxygen flow rate dependence of the properties of textured ZnO:Al films[J].Journal of Optoelectronics·laser,2008,19(9). | |
| Authors: | DUAN Ling-wei XUE Jun-ming YANG Rui-xi ZHAO Ying GENG Xin-hua |
| Affiliation: | DUAN Ling-wei1,2,XUE Jun-ming2,YANG Rui-xia1,ZHAO Ying2,GENG Xin-hua2(1.School of Information Engineering,Hebei University of Technology,Tianjin,300130 China,2.Institute of photo-electronic thin film devices , technique of Nankai University,Key Laboratory of photoelectronics thin film devices , technique of Tianjin,Key Laboratory of Optoelectronic Information Science , Technology,Chinese Ministry of Education,300071 China) |
| Abstract: | ZnO:Al(ZAO)thin films with low resistivity and high ransmittance were deposited on glass substrate by mid-frequency magnetron sputtering,Textured ZAO films which is suitable for thin film solar cells were prapard by etching the smooth films in 0.5% diluted HCl.The dependence of surface textures on oxygen flow rate was investigated.The results indicate that,with the increase of oxygen flow rate,the film surface morphology becomes better,and the best textured ZAO film was achieved at 3.6 sccm. |
| Keywords: | mid-frequency sputtering ZnO:Al(ZAO)films oxygen flow rate textural structure wet-etching |
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