| 微机电系统技术的研究现状和展望 |
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| 引用本文： | 严宇才,张端. 微机电系统技术的研究现状和展望[J]. 电子工业专用设备, 2011, 40(4): 1-8,46 |
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| 作者姓名： | 严宇才 张端 |
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| 作者单位： | 浙江工业大学信息工程学院,浙江杭州,310032 |
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| 摘 要： | 微机电系统(MEMS)是由微加工技术制造的微型传感器、微型执行器及集成电路组成的器件或系统.介绍了MEMS技术的研究背景和发展历程,着重阐述了微机电系统的核心技术和商业应用,其中特别提到了单芯片系统方面的前沿研究,最后就MEMS技术的前景和研究方向进行了探讨和展望.
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| 关 键 词： | 微机电系统 微加工技术 片上系统 加速度计 |
MEMS Technology Research Status and Further Research Works Forecast |
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| YAN Yucai,ZHANG Duan. MEMS Technology Research Status and Further Research Works Forecast[J]. Equipment for Electronic Products Marufacturing, 2011, 40(4): 1-8,46 |
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| Authors: | YAN Yucai ZHANG Duan |
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| Affiliation: | YAN Yucai,ZHANG Duan (College of Information Engineering,Zhejiang University of Technology,Hangzhou 310023,China) |
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| Abstract: | MEMS is a micro-component or micro-system integrated by micro sensor,micro executor and IC.The background of the research,main MEMS core technology and MEMS applications were introduced.Especially,the research works in a single-chip system were introduced.Finally,conclusions are drawn as to where future MEMS technology may lead. |
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| Keywords: | MEMS Micro-machined fabrication technology SOC Accelerometer |
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