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应变致能带分裂对Si_(1-x)Ge_x应变层中重掺杂禁带窄变的影响
引用本文:吴文刚,曾峥,罗晋生.应变致能带分裂对Si_(1-x)Ge_x应变层中重掺杂禁带窄变的影响[J].固体电子学研究与进展,1995(2).
作者姓名:吴文刚  曾峥  罗晋生
作者单位:西安交通大学电子工程系
摘    要:针对应变Si1-xGex的应变致能带分裂及重掺杂对裂值的影响,提出了多子双带结构的等价有效简并度模型和有关算法。模型中考虑了非抛物线能带结构。应用该模型,计算了赝形生长在(100)Si衬底上的Si1-xGex应变层的重掺杂禁带窄变,发现当掺杂超过一定浓度(对于p型和n型合金,该浓度分别约为1.9×1019cm-3和3.5×1019cm-3)后,它在某一Ge组分下得到极大值,而当掺杂低于这个浓度时,它则随Ge组分的增加单调下降。文中还将计算结果与其它未细致考虑应变致能带分裂因素的理论工作进行了比较。

关 键 词:锗硅合金,应变,重掺杂,能带结构

Effects of Strain Induced Splitting of Energy Bands on the Bandgap Narrowing Due to Heavy Doping in Strained Si_(1-x)Ge_x Layers
Wu Wengang, Zeng Zheng, Luo Jinsheng.Effects of Strain Induced Splitting of Energy Bands on the Bandgap Narrowing Due to Heavy Doping in Strained Si_(1-x)Ge_x Layers[J].Research & Progress of Solid State Electronics,1995(2).
Authors:Wu Wengang  Zeng Zheng  Luo Jinsheng
Abstract:o take the effects of strain induced splitting of energy bands into account when calculating the bandgap narrowing (BGN) due to heavy doping in pseudomorphic Si1-xGex layers grown on (100) Si substrate, an equivalent effective degeneracy (EED) model is proposed for the majority carrier double-band structure of the strained alloy. The results are compared with those taken from other theoretical works, in which the influences of strain induced splitting of energy bands were ignored, and show that there is a maximum value of the BGN at a certain Ge fraction if dopant concentration exceeds about 1. 9 X 1019 cm-3 and 3. 5 X 1019 cm-3 for the p-and n-type alloy respectively, and that, otherwise, it will decrease continuously as Ge fraction increases.
Keywords:SiGe Alloy  Strain  Heavy Doping  Band Structure
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