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Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater |
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| Authors: | Peter Meszmer Karla Hiller Steffen Hartmann Alexey Shaporin Daniel May Raul David Rodriguez Jörg Arnold Gianina Schondelmaier Jan Mehner Dietrich R T Zahn Bernhard Wunderle |
| Affiliation: | 1. Faculty for Electrical Engineering and Information Technologies, Chair Materials and Reliability of Microsystems, Technische Universit?t Chemnitz, 09107, Chemnitz, Germany 2. Center for Microtechnologies ZfM, Technische Universit?t Chemnitz, Chemnitz, Germany 3. Faculty for Electrical Engineering and Information Technologies, Chair of Microsystems and Precision Engineering, Technische Universit?t Chemnitz, Chemnitz, Germany 4. Faculty of Natural Science, Institute of Physics, Chair Semiconductor Physics, Technische Universit?t Chemnitz, Chemnitz, Germany 5. Zwickau, Germany |
| Abstract: | In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile testing platform for thermo-mechanical material characterization of one dimensional materials on a micro- and nano-scopic scale under different environmental conditions, as varying temperatures, pressure, moisture or even vacuum and is realised in BDRIE technology. It is shown, that the actuator concept fulfills the requirements for the use in a tensile loading stage along with heterogeneously integrated nanofunctional elements, following a specimen centered approach in line with bottom-up self-assembly processes. Simulation and experiment agree very well in the thermal and mechanical domain and allow subsequent optimisation of the actuator performance. |
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