| 微机电数字地震检波器设计及误差标定补偿方法 |
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| 引用本文： | 杜 敏,李巧燕,徐国栋.微机电数字地震检波器设计及误差标定补偿方法[J].振动与冲击,2013,32(9):84-89. |
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| 作者姓名： | 杜 敏 李巧燕 徐国栋 |
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| 作者单位： | 1. 防灾科技学院 防灾工程系, 河北 三河市 065201；2. 北京工业大学 城市与工程安全减灾教育部重点实验室，北京 100124 |
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| 摘 要： | 研制一种新型数字硅MEMS地震检波器，集成三支硅MEMS陀螺与加速度计，可提供三维加速度、速度、角速度及位移等振动信息，可提高检波器的信息量及效率；提出的基于无需指北单轴速率转台的硅MEMS地震检波器六位置正反速率标定方法，不仅可提高标定精度与效率，且可减小标定工作量。并经实验验证该数字硅MEMS地震检波器样机及标定补偿方法的可行性与适用性。
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| 关 键 词： | 微机电系统 地震检波器 加速度计 陀螺 误差标定 |
| 收稿时间： | 2012-5-8 |
| 修稿时间： | 2012-6-13 |
Design and Error Calibration of A Micro-Electro-Mechanical System Digital Geophone |
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DU Min,LI Qiao-yan,XU Guo-dong
.Design and Error Calibration of A Micro-Electro-Mechanical System Digital Geophone[J].Journal of Vibration and Shock,2013,32(9):84-89. |
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| Authors: | DU Min LI Qiao-yan XU Guo-dong
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| Affiliation: | 1. Institute of Disaster-prevention Science and Technology, Sanhe 065201,China；2. Beijing University of Technology, Beijing 100124,China |
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| Abstract: | A new-type seismic geophone, which integrating three MEMS accelerations and gyroscopes, is developed. It can provide linear acceleration, linear velocity, angular velocity, vibration displacement, and has greatly improved performance and efficiency. A new six-position rotation calibration scheme for the digital geophone is proposed which utilizes only a single axis turn-table without north reference. The experiment results show that the proposed method has improved the measurement precision, and verifies validity of the silicon MEMS geophone. |
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| Keywords: | micro electro-mechanical systemgeophoneaccelerometergyroscopeerror calibration |
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