| 影响扫描电镜图像质量的因素分析 |
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| 引用本文： | 周广荣. 影响扫描电镜图像质量的因素分析[J]. 现代仪器, 2010, 0(6) |
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| 作者姓名： | 周广荣 |
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| 摘 要： | 本文介绍影响扫描电镜图像质量的因素及其对图像质量的影响,分别从加速电压、扫描速度和信噪比、束斑直径、探针电流、消像散校正、工作距离以及反差对比等分析图像质量的变化原因,提出提高图像质量的方法。
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| 关 键 词： | 扫描电子显微镜 SEM 图像质量 |
Analysis of the iactors influencing image quality of scanning electron microscope |
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| Zhou Guangrong. Analysis of the iactors influencing image quality of scanning electron microscope[J]. Modern Instruments, 2010, 0(6) |
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| Authors: | Zhou Guangrong |
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| Abstract: | The factors and their influences on SEM image quality were discussed in this paper.The selections of electron acceleration voltage,scanning rate and S/N,spot size,probe current,stigmator,working distance,contrast, etc.,have been studied through analyzing image qualities.Methods to increase image quality were proposed. |
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| Keywords: | Scanning electron microscope SEM Image quality |
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