Crystallographic analysis of thin specimens |
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| Authors: | V G M SIVEL F D TICHELAAR† H MOHDADI P F A ALKEMADE† & H W ZANDBERGEN† |
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| Affiliation: | Netherlands Institute for Metals Research, Rotterdamseweg 137, 2628 AL Delft, the Netherlands; National Centre for High Resolution Electron Microscopy, Department of Materials Science and Technology, Delft University of Technology, Rotterdamseweg 137, 2628 AL Delft, the Netherlands |
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| Abstract: | Electron backscattering diffraction (EBSD) is commonly used on bulk samples for crystallographic material characterization. In this work, the technique was applied on transmission electron microscopy (TEM)-type thin specimens, prepared with a focused ion beam. Orientation maps were successfully collected on specimens made of a Cu3Au copper–gold alloy. As compared to EBSD analysis on a bulk specimen, an improved pattern quality and a high spatial resolution (well below 10 nm) were obtained. Furthermore, a clear improvement of the signal-to-noise ratio with decreasing sample thickness was observed. |
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| Keywords: | Copper–gold alloy EBSD focused ion beam lift-out specimen orientation mapping sample thickness |
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