| 无限变焦3D形貌仪测量条件及不确定度分析 |
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| 引用本文： | 郭继平,;于冀平,;方南家,;王强兵,;陈照聚,;伍沛刚.无限变焦3D形貌仪测量条件及不确定度分析[J].中国测试技术,2014(3):28-31. |
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| 作者姓名： | 郭继平 ;于冀平 ;方南家 ;王强兵 ;陈照聚 ;伍沛刚 |
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| 作者单位： | [1]深圳市计量质量检测研究院,广东深圳518109; [2]深圳大学光电工程学院,教育部光电子器件与系统重点实验室,广东深圳518060 |
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| 基金项目： | 深圳市科技研发基金项目（CXC201105060038A） |
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| 摘 要： | 为确定影响光学3D形貌测量结果的条件及因素,该文通过分组测量实验对无限变焦3D形貌测量仪在不同测量条件下的测量结果进行定量分析,根据实验结果总结出应用该仪器进行各类测量时选择测量条件的一般性原则。同时,分别对该仪器在不同测量应用中测量结果的不确定度进行了分析。结果表明:照明条件、视场选择、扫描分辨率等条件因素对测量结果会产生较大影响,因此在实际测量时应注意选择合适的条件以减小测量误差。
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| 关 键 词： | 几何量计量 微观形貌测量 光学D测量 变焦技术 不确定度分析 |
Measuring conditions and measurement uncertainty analysis of 3D morphology measuring machine based on infinite focus |
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| Affiliation: | GUO Ji-ping, YU Ji-ping, FANG Nan-jia, WANG Qiang-bing, CHEN Zhao-ju, WU Pei-gang (1. Shenzhen Academy of Metrology ＆ Quality Inspection,Shehzhen 518109,China; 2. College of Optoelectronics Engineering,Key Laboratory of Optoelectronic Devices and Systems, Education Ministry of China, Shenzhen University, Shenzhen 518060,China) |
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| Abstract: | In order to study the conditions and factors that will influence the measurement results, and provide a useful technical reference for the application of this kind of machine in different measuring task. A series of experiments on using infinite focus 3D morphology measuring machine has been designed. The quantitative analysis of influence of measuring conditions has been made. Also the characteristic of measurement uncertainty of the machine has been analyzed. The experimental results show that factors including lighting, imaging field, resolution have a considerable influence on measurement results, and suitable condition settings must be done before measuring to reduce measurement error. |
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| Keywords: | dimensional measurement micro-morphology measurement optical 3D measurement focus variation uncertainty analysis |
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