| 微谐振传感器同频干扰的建模与消除 |
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| 引用本文： | 陈健,陈德勇,王军波,杨苗苗,毋正伟,陈李.微谐振传感器同频干扰的建模与消除[J].测控技术,2006,25(8):5-6,10. |
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| 作者姓名： | 陈健 陈德勇 王军波 杨苗苗 毋正伟 陈李 |
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| 作者单位： | 中国科学院,电子所传感技术国家重点实验室,北京,100080 |
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| 摘 要： | 主要研究了静电激励/电容拾振谐振式硅微加速度传感器的同频干扰问题,分析了几种干扰源,建立了同频干扰的电路等效模型,提出一种基于双端激励/双端检测的结构,采用二次差分的方式消除同频干扰.
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| 关 键 词： | 微机械电子系统 微谐振式传感器 同频干扰 双端激励/差分检测 |
| 文章编号： | 1000-8829（2006）08-0005-02 |
| 收稿时间： | 2005-10-26 |
| 修稿时间： | 2005-10-26 |
Modeling and Eliminating the Same Frequency Disturbance of Resonant Microsensor |
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| CHEN Jian,CHEN De-yong,WANG Jun-bo,YANG Miao-miao,WU Zheng-wei,CHEN Li.Modeling and Eliminating the Same Frequency Disturbance of Resonant Microsensor[J].Measurement & Control Technology,2006,25(8):5-6,10. |
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| Authors: | CHEN Jian CHEN De-yong WANG Jun-bo YANG Miao-miao WU Zheng-wei CHEN Li |
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| Affiliation: | State Key Lab. of Transducer Tech., Inst. of Electronics, Chinese Academy of Sciences, Beijing 100080, China |
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| Abstract: | The research on the same frequency disturbance for the electrostatically excited and capacitive detected resonant beam accelerometer is introduced. Several kinds of sources of disturbance are considered and the equivalent circuit model is proposed. A method based on differential design to tackle this problem is put forward. |
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| Keywords: | MEMS resonant microsensor disturbance of the same frequency double-side excitation and differential detection |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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