| 冷坩埚原理及其在多晶硅制备中的应用 |
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| 引用本文： | 黄锋,陈瑞润,郭景杰,丁宏升,杨劼人,苏彦庆,傅恒志. 冷坩埚原理及其在多晶硅制备中的应用[J]. 材料工程, 2011, 0(7): 90-96 |
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| 作者姓名： | 黄锋 陈瑞润 郭景杰 丁宏升 杨劼人 苏彦庆 傅恒志 |
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| 作者单位： | 哈尔滨工业大学材料科学与工程学院,哈尔滨,150001 |
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| 基金项目： | 国家自然科学基金项目，华中科技大学材料成形与模具技术国家重点实验室开放基金 |
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| 摘 要： | 综述了冷坩埚技术的原理、特点与技术要求,重点介绍了电磁冷坩埚技术的工艺性能与影响因素,总结了各因素对冷坩埚性能的影响规律,最后概述了冷坩埚技术在多晶硅提纯与成型制备中的优势和应用,并展望了其未来的发展.
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| 关 键 词： | 冷坩埚 电磁感应 多晶硅 提纯 |
Cold Crucible Theory and Its Application in Preparing of Multicrystalline Silicon |
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| HUANG Feng,CHEN Rui-run,GUO Jing-jie,DING Hong-sheng,YANG Jie-ren,SU Yan-qing,FU Heng-zhi. Cold Crucible Theory and Its Application in Preparing of Multicrystalline Silicon[J]. Journal of Materials Engineering, 2011, 0(7): 90-96 |
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| Authors: | HUANG Feng CHEN Rui-run GUO Jing-jie DING Hong-sheng YANG Jie-ren SU Yan-qing FU Heng-zhi |
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| Affiliation: | (School of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150001,China) |
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| Abstract: | The principle,characteristic and technical requirements of cold crucible are reviewed in this paper.The theory,technical parameters and influencing factors of cold crucible are introduced.Effects of technical factors on cold crucible performance are summarized.The advantages and application of purifying and preparing of multicrytalline silicon with cold crucible are overviewed too.Cold crucible technology will be a hopeful and important technique in materials engineering. |
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| Keywords: | cold crucible electromagnetic induction multicrytalline silicon purification |
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