| IC硅片纳米级抛光机专家控制技术的研究 |
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| 引用本文： | 赵文宏,文东辉,戴勇,袁巨龙.IC硅片纳米级抛光机专家控制技术的研究[J].金刚石与磨料磨具工程,2006(5):90-92. |
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| 作者姓名： | 赵文宏 文东辉 戴勇 袁巨龙 |
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| 作者单位： | 浙江工业大学机械制造及自动化教育部重点实验室,杭州,310032;浙江工业大学超精密加工研究中心,杭州,310032 |
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| 基金项目： | 国家自然科学基金;浙江省青年科技人才专项基金 |
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| 摘 要： | 本文介绍了自行设计的智能型纳米级抛光机的智能控制系统，对其实现方法进行了研究，分析了智能控制系统的组成，提出并建立了基于专家控制系统的解决方案。采用Windows CE软件平台，图形化界面功能指示，以及采用高可靠性的实时操作系统、超级数模混合RISC嵌入式处理器、高精度光栅传感器、无级调速、无刷直流电机驱动等技术，试验结果表明可以实现对抛光机的智能控制。
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| 关 键 词： | 超精密抛光 专家控制 嵌入式处理器 |
| 文章编号： | 1006-852X(2006)05-0090-03 |
| 修稿时间： | 2006年6月17日 |
Research on special controlling technology of ultra - precision polishing machine for IC wafer |
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| Zhao Wenhong,Wen Donghui,Dai Yong,Yuan Julong.Research on special controlling technology of ultra - precision polishing machine for IC wafer[J].Diamond & Abrasives Engineering,2006(5):90-92. |
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| Authors: | Zhao Wenhong Wen Donghui Dai Yong Yuan Julong |
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| Abstract: | The intelligent controlling system of ultra-precision polishing machine is introduced and its realizing method is studied in this paper.At the same time,the composing of intelligent controlling system is analyzed,and then the resolving-project is provided based on the special controlling system.In the controlling system,Windows CE software-flat is adopted,and the interfacial function-showing with graph is provided.By using such techniques as the real-time operating system with high reliability,inbuilt RISC-processor,raster sensor with high precision,timing at stepless-speed,driving with no-brush direct current dynamo,and so on,the intelligent controlling of the polishing machine is realized,which can be used for nano polishing of IC wafers. |
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| Keywords: | ultra-precision polishing special controlling inbuilt processor |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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