In‐situ‐Sauerstoffmesszellen für den Einsatz im Vakuum. In‐situ oxygen sensors for the use in vacuum

The use of galvanic cells with oxide‐ion‐conducting solid electrolytes as sensors in vacuum allows to measure directly the oxygen partial pressure deciding for redox processes at the surface of workpieces during heat treatments. The oxygen exists either as a free molecular gaseous component or in the thermodynamic equilibrium with other gases. The bases of the known gas potentiometry are valid also in vacuum. Reducing gases are indicated in redoxquotients as Q_H = p(H₂O)/p(H₂). For the technique of measurements with solid electrolytes in vacuum special requirements arise. Probes with air reference electrode are already offered commercially. A solid reference electrode formed with Cu and Cu₂O was tested now in the range of pressure from 1 to 10^‐7 bar. It is usable at sensor temperatures between 400 and 650 centigrades. Important disturbances by oxygen permeability of the solid electrolyte were not observed in this temperature range. Changes of the composition of rest gases in vacuum, often arising as a result of wall reactions are indicated by alterations of p(O₂) or Q_H respectively. The accuracy of measurements is improved by consideration of temperature differences between the electrodes.