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Flammenpyrolytische Silikatbeschichtung bei Normaldruck als Alternative zu Vakuumverfahren. Combustion CVD of silica as an alternative method to vakuum treatment |
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| Authors: | Thomas Richter Hans‐Jürgen Tiller |
| Abstract: | In advancement of Pyrosil®‐technology a new kind of precursor delivery was developed, build and tested on real substrates. A Lab‐demonstrator was build to demonstrate the resources of the technology. |
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