Buried annealed/proton-exchanged LiNbO3 waveguides fabricated by direct bonding technique |
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| Authors: | Fujimura M. Beniya K. Suhara T. |
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| Affiliation: | Dept. Electr., Electron., & Inf. Eng., Osaka Univ., Suita; |
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| Abstract: | A new method for fabrication of buried annealed/proton-exchanged LiNbO3 waveguides using direct bonding technique is demonstrated. The buried waveguides were fabricated and tested at 1.55 m wavelength, and guided modes with excellent symmetry were obtained. The waveguides are suitable for efficient coupling to optical fibres and/or efficient nonlinear-optic wavelength conversion devices. |
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