三维复杂微器件的微立体光刻成形

介绍了一种具有更高加工分辨率且可直接成形三维复杂微型器件的一次曝光型微立体光刻成形装置。重点给出了经薄膜晶体管阵列编址的液晶显示光阀表盘，即可控透光模板的构造、性能及其对微立体光刻成形装置层面加工分辨率和截面曝光尺寸的影响。为证明微立体光刻工艺在成形三维复杂微结构时的优越性，给出了所加工出的微机械部件、微型件浇铸模、微流体系统部件等实物的扫描电子显微照片及相关的加工参数。

Micro Stereo-lithography Process for Fabricating 3D Microstructure

An once exposition micro stereo-lithography prototyping device with higher machining resolution and can be used for directly prototyping 3D complex microstructure is introduced in this paper. It emphasizedthe structure, specifications and its influence to the machining resolution of the planes and to the section exposition size of the LCD light valve dial, e.g. controlled light transmitted module, which is addressed by the transistorchips array. The scanning electric microphotographsof the solids of machined micro machineryparts, micro casting molds and micro liquid system parts are showed for illustratingthe advantages of the micro stereo-lithography technology in prototyping the 3D complex microstructures.