High Tunability of Nonepitaxially Grown Ba0.6Sr0.4TiO3 Thin Films Prepared by Plasma‐Assisted Pulsed Laser Deposition |
| |
| Authors: | Xiliang He Xiaomin Li |
| |
| Affiliation: | 1. State Key Laboratory of High Performance Ceramics and Superfine Microstructures, Shanghai Institute of Ceramics, Chinese Academy of Sciences, , Shanghai, 200050 China;2. University of Chinese Academy of Sciences, , Beijing, China |
| |
| Abstract: | ![]()
Nonepitaxially grown Ba0.6Sr0.4TiO3 (NE‐BSTO) thin film with tunability of 65.4% and low leakage current was obtained on Ir electrode by oxygen plasma‐assisted pulsed laser deposition (PLD), and epitaxially grown Ba0.6Sr0.4TiO3 (E‐BSTO) thin film with tunability of 32.5% was obtained by PLD without plasma assistance. Results indicate that the NE‐BSTO film possessed higher oxygen content, lower tetragonal distortion, and low stress, all of which contributed to its excellent dielectric properties. This work demonstrates that NE‐BSTO thin films are well suited for room temperature tunable microwave device applications. |
| |
| Keywords: | |
|
|
