| Characterization of the Diamond—like Carbon based Functionally Gradient Film |
| |
| 作者姓名： | FengMA XunCAI GangLI QiulongCHEN HongtaoMA |
| |
| 作者单位： | Feng MA，Xun CAI，Gang LI and Qiulong CHENKey Lab. of the Ministry of Education for High Temperature Materials and Testing，Shanghai JiaoTong University，Shanghai 200030，ChinaHongtao MAState key Lab. of Tribology，Tsinghua University，Beijing 100084. China |
| |
| 基金项目： | The authors are thankful for the financial support of the key lab of precisiok precision processing of harbin institute of technology china ,the help of the school material science and engineering,harbin institute of technology,for the ion implantation e |
| |
| 摘 要： | Diamond-like carbon coatings have been used as solid lubricating coatings in vacuum technology for their good physical and chemical properties. In this paper, the hybrid technique of unbalanced magnetron sputtering and plasma immersion ion implantation (Pill) was adopted to fabricate diamond-like carbon-based functionally gradient film, N/TiN/Ti(N,C)/DLC, on the 304 stainless steel substrate. The film was characterized by using Raman spectroscopy and glancing X-ray diffraction (GXRD), and the topography and surface roughness of the film was observed using AFM. The mechanical properties of the film were evaluated by nano-indentation. The results showed that the surface roughness of the film was approximately 0.732 nm. The hardness and elastic modulus, fracture toughness and interfacial fracture toughness of N/TiN/Ti(N,C)/DLC functionally gradient film were about 19.84 GPa, 190.03 GPa, 3.75 MRa.m1/2 and 5.68 MPa-m1/2, respectively. Compared with that of DLC monolayer and C/TiC/DLC multilayer, this DLC grad
|
| 关 键 词： | 类金刚石 功能 梯度薄膜 氮化钛 AFM 拉曼散射光谱 碳化钛 结构 304不锈钢 表面涂层 制备 表面处理 |
| 收稿时间： | 2001-11-29 |
Characterization of the Diamond-like Carbon Based Functionally Gradient Film |
| |
| FengMA
,XunCAI
,GangLI
,QiulongCHEN
,HongtaoMA.Characterization of the Diamond-like Carbon Based Functionally Gradient Film[J].Journal of Materials Science & Technology,2002,18(5):447-450. |
| |
| Authors: | Feng MA Xun CAI Gang LI Qiulong CHEN Hongtao MA |
| |
| Affiliation: | Key Lab. of the Ministry of Education for High Temperature Materials and Testing, Shanghai JiaoTong University, Shanghai 200030, China... |
| |
| Abstract: | Diamond-like carbon coatings have been used as solid lubricating coatings in vacuum technology for their good physical and chemical properties. In this paper, the hybrid technique of unbalanced magnetron sputtering and plasma immersion ion implantation (Plll) was adopted to fabricate diamond-like carbon-based functionally gradient film, N/TiN/Ti(N,C)/DLC, on the 304 stainless steel substrate. The film was characterized by using Raman spectroscopy and glancing X-ray diffraction (GXRD), and the topography and surface roughness of the film was observed using AFM. The mechanical properties of the film were evaluated by nano-indentation. The results showed that the surface roughness of the film was approximately 0.732 nm. The hardness and elastic modulus, fracture toughness and interfacial fracture toughness of N/TiN/Ti(N,C)/DLC functionally gradient film were about 19.84 GPa, 190.03 GPa, 3.75 MRa.m1/2 and 5.68 MPa.m1/2, respectively. Compared with that of DLC monolayer and C/TiC/DLC multilayer, this DLC gradient film has better qualities as a solid lubricating coating. |
| |
| Keywords: | Diamond like carbon Nano-indentation Raman scattering spectroscopy AFM |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《材料科学技术学报》浏览原始摘要信息 |
|
点击此处可从《材料科学技术学报》下载全文 |
|
