| 全机械扫描强流离子注入机重复性研究 |
| |
| 引用本文： | 陈林 杨建生. 全机械扫描强流离子注入机重复性研究[J]. 微细加工技术, 1997, 0(1): 26-30 |
| |
| 作者姓名： | 陈林 杨建生 |
| |
| 作者单位： | 电子工业部第48研究所!长沙410111 |
| |
| 摘 要： | 对影响全机械扫描强流离子注入机剂量重复性的因素进行了分析。对束流纹波的影响建立了数学模型，计算了束流纹波对剂量重复性的影响。结果表明只要束流纹波在9％以内，剂量重复性可控制在1％以下。
|
| 关 键 词： | 强流离子注入机 全机械扫描 剂量重复性 |
STUDY ON REPRODUCIBILITY OF HIGH CURRENT ION IMPLANTER WITH FULL MECHANICAL SCAN |
| |
| Chen Lin ,Yang Jiansheng, Yan Hengdi. STUDY ON REPRODUCIBILITY OF HIGH CURRENT ION IMPLANTER WITH FULL MECHANICAL SCAN[J]. Microfabrication Technology, 1997, 0(1): 26-30 |
| |
| Authors: | Chen Lin Yang Jiansheng Yan Hengdi |
| |
| Abstract: | The factors affecting on the reproducibility of high current ion implonterwith full mechnical scan are discussed. Especially,a mathematic model about theeffect of beam current ripple is founel to calculate the effect of beam current rip-ple on dose reproducibility. The result of calculation indicates that if ripple factorof beam current is kept within 9%,the reproducibility can be controlled 1 %. |
| |
| Keywords: | high current ion implanter full mechenical scan dose reproducibility |
| 本文献已被 CNKI 维普 等数据库收录！ |
