| Abstract: | Astatistical model that describes the analog measurement of a fluctuating light intensity that arises from a non-Gaussian scattering process is developed. The higher-order statistical moments are derived for a p-i-n diode receiver model and gamma-distributed intensity fluctuations. Criteria for the accurate measurement of the scattering fluctuations are found, and these are used to analyze data derived from an on-line scatterometer system. Implications for future on-line measurement technology are discussed. |
