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Processing of Oriented K(Ta,Nb)O3 Films Using Chemical Solution Deposition
Authors:Kazuyuki Suzuki  Wataru Sakamoto  Toshinobu Yogo  Shin-ichi Hirano
Affiliation:Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464–8603, Japan
Abstract:
K(Ta,Nb)O3 (KTN) thin films have been prepared by the chemical solution deposition method. KTN precursors consisted of a uniform mixture of K[Ta(OC2H5)6] and K[Nb(OC2H5)6] with interaction at the molecular level. Perovskite KTN thin films with the desired composition (Ta/Nb = 65/35, 50/50, and 35/65) were synthesized from the precursor solutions by the dip coating method. KTN thin films with (100) preferred orientation were successfully synthesized on MgO(100) and Pt(100)/MgO(100) substrates. X-ray pole figure measurements showed that grains of KTN films had a prominent three-dimensional regularity on MgO(100) and Pt(100)/MgO(100) surfaces. The Curie temperatures of KTN films decreased with increasing Ta/Nb ratio. Typical P-E hysteresis loops were observed for KTN thin films of three compositions on Pt(100)/MgO(100) substrates. The values of remanent polarization ( P r) of KTN films increased as the Ta/Nb ratio changed from 65/35 to 35/65.
Keywords:
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