| 基于MEMS的压阻式超声传感器的设计与测试 |
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| 作者姓名： | 于佳琪 何常德 宛克敬 廉德钦 薛晨阳 张文栋 |
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| 作者单位： | Key Laboratory of Instrumentation Science&Dynamic Measurement,Ministry of Education,North University of China;Key Laboratory of Science and Technology on Electronic Test & Measurement,North University of China |
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| 基金项目： | “基于纳机电矢量水听器面阵的水下目标成像机理与技术研究”( 61127008); |
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| 摘 要： | A kind of piezoresistive ultrasonic sensor based on MEMS is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the sensor.On the basis of the theoretical analysis,the structural size and layout location of the piezoresistors are determined by simulation analysis.The boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic signal.The membrane-beam microstructure is fabricated integrally by MEMS manufacturing technology.Finally,this paper presents the experimental characterization of the ultrasonic sensor,validating the theoretical model used and the simulated model.The sensitivity reaches -116.2 dB(0 dB reference = 1 V/μbar,31 kHz),resonant frequency is 39.6 kHz,direction angle is 55°.
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| 关 键 词： | MEMS piezoresistive ultrasonic sensor ANSYS membrane-beams |
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